Micro-optics and Lithography


Micro-optics and Lithography Authors: , Format: Hardback First Published: Published By: VUBPress Pages: 206 Illustrations and other contents: Ill.d.tabs.ch. Language: English ISBN: 9789054871675 Categories: ,

This text gives an overview of diffractive and refractive micro-optics, and includes also guided wave micro-optics. Special attention is given to the latest techniques including deep etch lithography, like excimer lasers, LIGA and high energy ion radiation. It includes optical data transmission in waveguides and free-space, compact optical imaging systems, and many other areas of optical engineering. The major techniques are covered, with methods for each, and the book provides a reference as to what is now possible in the field of micro-optics.

Weight0.52 kg


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